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Cylindrical coordinate type clean robot(cfrp) - List of Manufacturers, Suppliers, Companies and Products | IPROS GMS

Cylindrical coordinate type clean robot Product List

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3-Axis Cylindrical Coordinate Clean Robot SSCR3115S Series

3-Axis Cylindrical Coordinate Clean Robot SSCR3115S Series

Suitable for small wafer transport, allowing for a compact device layout.

The SSCR3115S series of 3-axis cylindrical coordinate clean robots for super clean rooms is suitable for transporting small-diameter wafers inside semiconductor manufacturing equipment, inspection equipment, and LED manufacturing equipment, thanks to its reduced footprint and lightweight design, allowing for a more compact equipment layout. It is compatible with the SSCR2090S-PM and can be modified to have a link arm specification or a Z-axis-less specification. For more details, please contact us or refer to the catalog.

  • Transport and handling robots
  • Other industrial robots
  • Cylindrical coordinate type clean robot

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3-Axis Cylindrical Coordinate Clean Robot SCR3000CS Series

3-Axis Cylindrical Coordinate Clean Robot SCR3000CS Series

It is suitable for wafer transport in semiconductor manufacturing equipment, inspection devices, etc.

The SCR3000CS series of three-axis cylindrical coordinate clean robots for super clean rooms is suitable for wafer transport within semiconductor manufacturing equipment and inspection devices. Depending on the equipment layout, you can choose between base type and flange type, and the S-curve acceleration and deceleration control allows for high-speed and high-precision wafer transport. For more details, please contact us or refer to the catalog.

  • Transport and handling robots
  • Other industrial robots
  • Cylindrical coordinate type clean robot

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3-Axis Cylindrical Coordinate Clean Robot SCR3100S-PM Series

3-Axis Cylindrical Coordinate Clean Robot SCR3100S-PM Series

By reducing the footprint, the equipment layout can be downsized.

The Super Clean Room 3-Axis Cylindrical Coordinate Clean Robot SCR3100S series is suitable for transporting small-diameter wafers within semiconductor manufacturing equipment and inspection devices, thanks to its reduced footprint, allowing for a more compact equipment layout. You can choose between base type and flange type according to your equipment layout. For more details, please contact us or refer to the catalog.

  • Transport and handling robots
  • Other industrial robots
  • Cylindrical coordinate type clean robot

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2-Axis Cylindrical Coordinate Clean Robot SSCR2090S Series

2-Axis Cylindrical Coordinate Clean Robot SSCR2090S Series

It features an energy-saving design using a full-axis stepping motor.

The SSCR2090S series of super clean room two-axis cylindrical coordinate clean robots is suitable for transporting small-diameter wafers inside semiconductor manufacturing equipment, inspection equipment, and LED manufacturing equipment, thanks to its reduced footprint and lightweight design, allowing for a more compact equipment layout. Each axis retains the specifications of higher-end models, including encoders, latch-type solenoid valves, and pressure switches with digital displays. For more details, please contact us or refer to the catalog.

  • Transport and handling robots
  • Other industrial robots
  • Cylindrical coordinate type clean robot

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3-Axis Cylindrical Coordinate Clean Robot SHR3000 Series

3-Axis Cylindrical Coordinate Clean Robot SHR3000 Series

It is possible to choose between base type and flange type according to the device layout.

The SHR3000 series of 3-axis cylindrical coordinate robots for super clean rooms is suitable for wafer transport within semiconductor manufacturing equipment and inspection devices. You can choose between base type and flange type according to the equipment layout. The S-curve acceleration and deceleration control allows for high-speed and high-precision transport of wafers. It is possible to accommodate optimal chucks tailored to the transported items and equipment layout. For more details, please contact us or refer to the catalog.

  • Transport and handling robots
  • Other industrial robots
  • Cylindrical coordinate type clean robot

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Cylindrical Coordinate Clean Robot "PHT-R-4"

Cylindrical Coordinate Clean Robot "PHT-R-4"

Supports atmospheric transport of wafers! The main unit weighs approximately 47 kg and the controller weighs about 8 kg.

The "PHT-R-4" is a horizontal multi-joint wafer transport robot designed for use in clean rooms. It is capable of moving in the front and back (X-axis), rotating (θ-axis), moving up and down (Z-axis), and hand rotation (0 to 180 degrees), making it suitable for transporting wafers in the atmosphere. The drive motor is an AC servo motor with absolute encoder specifications for all axes. 【Product Overview (Excerpt)】 ■ Installation Environment: Inside clean rooms (ambient temperature 10 to 35 degrees, humidity below 70% RH) ■ Arm: Single arm (Material: Aluminum, CFRP, Ceramic) ■ Load Capacity: 3 kg (total weight of hand base, hand, and work) *For more details, please refer to the PDF document or feel free to contact us.

  • Company：PHT
  • Price：Other
  • Transport and handling robots
  • Cylindrical coordinate type clean robot

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3-Axis Cylindrical Coordinate Clean Robot MCR3000C Series

3-Axis Cylindrical Coordinate Clean Robot MCR3000C Series

It offers superior cost performance compared to conventional MHR.

The MCR3000C series, compatible with 300mm for super clean rooms, is suitable for wafer transport in semiconductor manufacturing equipment and inspection devices. It enables high-speed transport with all-axis AC servo, offering superior cost performance compared to conventional MHR models. You can choose between base type and flange type to match your equipment layout. It is possible to accommodate optimal chucks tailored to the transported items and equipment layout. For more details, please contact us or refer to the catalog.

  • Transport and handling robots
  • Other industrial robots
  • Cylindrical coordinate type clean robot

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4-axis cylindrical coordinate clean robot MTCR4000 series

4-axis cylindrical coordinate clean robot MTCR4000 series

It is suitable for wafer transport and enables high-speed transport using all-axis AC servos.

The MTCR4000 series, compatible with 300mm for super clean rooms, is suitable for wafer transport within semiconductor manufacturing equipment and inspection devices. It enables high-speed transport with full-axis AC servos, offering superior cost performance compared to conventional MTHR models. You can choose between base type and flange type according to your equipment layout. It is possible to accommodate optimal chucks tailored to the transported items and equipment layout. For more details, please contact us or refer to the catalog.

  • Transport and handling robots
  • Other industrial robots
  • Cylindrical coordinate type clean robot

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4-axis cylindrical coordinate clean robot STHR4000 series

4-axis cylindrical coordinate clean robot STHR4000 series

It is suitable for wafer transport and allows for quick wafer exchange.

The STHR4000 series of super clean room 4-axis cylindrical coordinate twin-arm robots is suitable for wafer transport in semiconductor manufacturing equipment and inspection devices. The two arms allow for quick wafer exchanges. You can choose between base type and flange type to match the equipment layout. S-curve acceleration and deceleration control enables high-speed and high-precision wafer transport. It is possible to accommodate optimal chucks tailored to the transported objects and equipment layout. For more details, please contact us or refer to the catalog.

  • Transport and handling robots
  • Other industrial robots
  • Cylindrical coordinate type clean robot

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4-axis cylindrical coordinate clean robot STCR4000S series

4-axis cylindrical coordinate clean robot STCR4000S series

The exchange of wafers can be done in a short time with two arms.

The Super Clean Room 4-axis cylindrical coordinate clean robot STCR4000S series is suitable for wafer transport within semiconductor manufacturing equipment and inspection devices. It allows for quick wafer exchanges with its two arms. It has obtained CE marking certification. It can accommodate optimal chucks tailored to the transported items and equipment layout. For more details, please contact us or refer to the catalog.

  • Transport and handling robots
  • Other industrial robots
  • Cylindrical coordinate type clean robot

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3-Axis Cylindrical Coordinate Clean Robot LHR3000 Series

3-Axis Cylindrical Coordinate Clean Robot LHR3000 Series

For Z strokes of 760mm or more, the Z-axis is multi-stage, allowing for low-pass line configuration.

The LHR3000 series clean robot with a 3-axis cylindrical coordinate system compatible with glass substrates is suitable for transporting glass substrates in liquid crystal manufacturing equipment and inspection devices. With a Z stroke of over 760mm, the Z-axis is multi-stage, allowing for low pass line configuration. It can accommodate optimal chucks tailored to the transported items and equipment layout. For more details, please contact us or refer to the catalog.

  • Transport and handling robots
  • Other industrial robots
  • Cylindrical coordinate type clean robot

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4-axis cylindrical coordinate clean robot LTHR4000 series

4-axis cylindrical coordinate clean robot LTHR4000 series

It is suitable for the transport of glass substrates for inspection devices, etc., within liquid crystal manufacturing equipment.

The LTHR4000 series clean robot with a 4-axis cylindrical coordinate system compatible with glass substrates is suitable for transporting glass substrates in liquid crystal manufacturing equipment and inspection devices. With a Z stroke of over 760mm, the Z-axis is multi-stage, allowing for low pass line configuration. It can accommodate optimal chucks tailored to the transported items and equipment layout. For more details, please contact us or refer to the catalog.

  • Transport and handling robots
  • Other industrial robots
  • Cylindrical coordinate type clean robot

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Vacuum-compatible 3-axis cylindrical coordinate clean robot SVCR3000 series

Vacuum-compatible 3-axis cylindrical coordinate clean robot SVCR3000 series

It can be used for transporting wafers inside a vacuum chamber.

The vacuum-compatible 3-axis cylindrical coordinate clean robot SVCR3000 series can be used for transporting wafers within a vacuum chamber. Compared to the SVHR, it has double the payload capacity and offers excellent cost performance. Additionally, it is compatible with the SVHR for installation, allowing for a smooth transition. It can accommodate optimal chucks tailored to the transported items and equipment layout. For more details, please contact us or refer to the catalog.

  • Transport and handling robots
  • Other industrial robots
  • Cylindrical coordinate type clean robot

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Vacuum-compatible 4-axis cylindrical coordinate clean robot STVCR4000 series

Vacuum-compatible 4-axis cylindrical coordinate clean robot STVCR4000 series

Compared to STVHR, the portable weight has doubled, resulting in excellent cost performance.

The vacuum-compatible 4-axis cylindrical coordinate clean robot STVCR4000 series can be used for transporting wafers within a vacuum chamber. Compared to the STVHR, it has double the payload capacity and offers excellent cost performance. Additionally, it is compatible with the STVHR for installation, allowing for a smooth transition during replacement. The adoption of a twin-arm design has reduced wafer exchange time. For more details, please contact us or refer to the catalog.

  • Transport and handling robots
  • Other industrial robots
  • Cylindrical coordinate type clean robot

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